Micro-electromechanical systems-based sensors and their applications

Abstract

or the past 20 years, microelectromechanical system (MEMS)-based sensors have been used as small, inexpensive sensors in manufacturing. A sensing device is a platform that monitors various physical or chemical signals between target molecules and transistors; then, these signal variations are achieved by an analyzing device with numerical or analog formats. MEMS sensors are highly practical for miniaturization due to their small dimensions, low energy consumption, high performance, and compatibility with batch fabrication. Medical societies and scientists have recently switched to adopting cost-effective and small-size biosensors to monitor and control the biological system, test food and water contaminants, detect different diseases, and more. Medical researchers seek a secure and low-cost method of conducting research, maintaining public surveillance, and offering patients with specialized health care facilities. Biosensors can be used to solve this problem quickly and easily. MEMS-based sensing technology is essential for a wide range of low-cost and improved-form-factors medical equipment. In this review, we provide an overview of recent developments in sensing mechanisms that can benefit MEMS sensors, with a focus on applications in the healthcare industry and their significant benefits in the medical field.