Fabrication of cylindrical micropins with various diameters using DC current density control

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Title
Fabrication of cylindrical micropins with various diameters using DC current density control
Author(s)
Y M Lim; H J Lim; Jang Ryol Liu; S H Kim
Bibliographic Citation
Journal of Materials Processing Technology, vol. 141, no. 2, pp. 251-255
Publication Year
2003
Abstract
An electrochemical method is shown to fabricate extremely thin cylindrical tungsten micropins. The cylindrical micropin is obtained by regulating the current density. The current profile for the current density control is obtained with a mathematical model based on the relationship between an electric charge and a surface area.
Keyword
MicropinCurrent density controlElectrochemical etchingMicromachining
ISSN
0924-0136
Publisher
Elsevier
DOI
http://dx.doi.org/10.1016/S0924-0136(03)00261-9
Type
Article
Appears in Collections:
1. Journal Articles > Journal Articles
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